ȭ ÷ ݵü
̼ EUV
ʱ ڱݸ 65000
1 븸 TSMC ߰
̻ȸ, ̻ 3
ȸ Ⱥ
Ⳳ Z DSι 23 Z ȭķ۽ ֵ 'ȭ EUV ' 縦 ϰ ִ. Z
Zڰ ÷ ݵü ߴ. ʱ ڱݸ 60(65,000).
Ŀ帮(ݵü Ź) 2 ǥ Ѵ.
23 Zڴ ȭķ۽ ȭ ڿܼ(EUV) Ρ ù . Ŀ ĥ Ҿִ ǿ(ȭ), Ȳ ȭ ν, Ⳳ Z ַ̽(DS)ι(), DSι Ŀ帮 () ߴ. 13 ҽɿ Ǯ ü Ȱ ʰ ִ Z ȸ ̳ ʾҴ.
̹ ű ο EUV Ե ָ ް ִ. ª EUV Ȱ ϰ ݵü ȸθ ϴ , ֱ ڸ (10 1m) ̼ ִ ʼ̴. EUV 1 1,500 Ѵ.
Z ڴ ִ ȭƸ(ArF) ֽ ̱ ̼ Ѱ غ ε, ϰ ١ EUV ȭǸ ݵü ɰ ȿ ƴ϶ ȸθ ϴ ʿ پ 꼺 ȹ ̶͡ .
Z ȭķ۽ EUV . Z
ȭ EUV 2019 Ϲݱ ϰȴ. ģ 2020 ȴ. Zڴ , 䱸Ǵ ÷ ݵü 忡 Ѵٴ ħ̴. 2020 65,000 Ŀ Ȳ ߰ ڰ ̾.
̹ Ը ڴ EUV Ȱ 7 Ŀ帮 ֵ, ߴ Ŀ帮 øڴٴ õ. Ŀ帮 忡 55.9% ϴ 븸 TSMC ߰ Ѵٴ ǹ̴. Zڴ D, ÷ ݵü о߿ 1 Ű Ŀ帮 忡 7.7% (2017 ) 4 ӹ. ڴ TSMC EUV 5 7 ȭƸ ڴٰ ߴ١ ݵü ð ο̶ Zڰ Ⱓ ª EUV Ѵٴ ̶͡ ߴ.
Ⳳ Z DSι ̳ 縦 ȭ űԶ ȭķ۽ ȭ, ̾ ݵü Ŭ ߽ ̶͡ Zڴ п پ ϰڴ١ .
Z 翡 ̻ Ȱ ϴ ̻ȸ ȴ. ̻ ̱ ֿ ̱ Ǹܹ븮 ü ý 11,000 Ű ó ȭ Ҹ ̱ Ű ȸ , 輱 ȭ ( ȭ ), ں õƴ. ӱⰡ ̺ ̴. ܱ ̻ ۷ι پ缺 ȮϷ δ. ̳ ̻ȸ ȸ ο ߴ.
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